研究了通过热丝CVD法在施加了Ni-P/Cu复合中间过渡层的W18Cr4V高速钢衬底表面进行金刚石涂层的沉积技术以及不同压力条件对沉积出的CVD金刚石涂层质量的影响。最后通过扫描电镜分别对Cu、Ni-P以及不同反应压力下沉积的金刚石涂层的表面形貌进行了检测分析,通过XRD、拉曼光谱仪、洛氏硬度仪对金刚石涂层性能进行检测分析。结果表明:Ni-P/Cu复合中间过渡层可以明显的抑制Fe、Co的催石墨化作用。在此基础上通过沉积参数的优化,在W18Cr4V高速钢衬底表面成功沉积出高质量的CVD金刚石涂层。压力为4 kPa条件下沉积的CVD金刚石涂层较5 k Pa的金刚石颗粒晶型明显、分布致密。
In machining the particle reinforced aluminum based composite material with high Si content using the cobalt-cemented tungsten carbide micro cutting tools, diamond like carbon （DLC） films are deposited on cobalt-cemented tungsten carbide micro-drills with two-step pretreatment method. Characteristics of DLC coated tools are investigated in bias-enhanced HFCVD system with the optimized hot filament arrangement. The optimization deposition technology is obtained and the wear mechanism of cutting tools is analyzed. The drilling performance of DLC coated tools is verified by the experiments of cutting particle reinforced aluminum based composite material （Si 15% in volume） compared with uncoated ones. Experimental results show that the two-step pretreatment method is appropriate for complex shaped cemented carbide substrates and ensures the good adhesive strength between the diamond film and the substrate. The cutting performance of DLC coated tool is enhanced 10 times when machining the Si particle reinforced aluminum based metal matrix composite compared with that of uncoated ones under the same cutting conditions.
