The isothermal and cyclic oxidation behaviors of bulk pure nickel and its magnetically sputtered Ni 0 5Y micro crystal coating were studied at 1?000?℃ in air. Scanning electronic microscopy (SEM) and transmission electronic microscopy (TEM) were used to examine structures of the coating and the NiO oxide films. Laser Raman spectrum was also used to measure the stress level in NiO films formed on bulk nickel and the coating. It was found that Ni 0 5Y micro crystal coating had lower oxidation rate, and the grain size of NiO formed on Ni 0 5Y coating was also relatively smaller than that formed on bulk nickel. Meanwhile, the compressive stress level of oxide film formed on Ni 0 5Y coating was lower than that formed on bulk nickel, and the oxide film’s high temperature plasticity was improved in the coating case. The improvements of anti oxidation properties of the sputtered Ni 0 5Y coating were due to the micro crystal structure and the rare earth element Y.