Aluminum samples have been analyzed by femtosecond polarization-resolved laser-induced breakdown spectroscopy （fs-PRLIBS）. We compare the obtained spectra with those obtained from nanosecond PRLIBS （ns-PRLIBS）. The main specific features of fs-PRLIBS are that a lower plasma temperature leads to a low level of continuum and no species are detected from the ambient gas. Furthermore, signals obtained by fs-PRLIBS show a higher stability than those of ns-PRLIBS. However, more elements are detected in the ns-PRLIBS spectra.
A comparative investigation of the resistance and ability to trigger high voltage（HV） discharge for a single filament（SF） and multiple filaments（MFs） has been carried out.The experimental results show that the trend of the breakdown threshold of the SF exactly follows that of its resistance,but this is not the case for the MF.The MF＇s resistance is much smaller than the SF＇s.However,the MF shows a slightly higher HV breakdown threshold than the SF.The underlying physics is that the measured resistance of the MF is collectively contributed by every filament in the MF while the HV breakdown threshold is determined by only one single discharging path.
The propagation of a plasma shock wave generated from an Al target surface ablated by a nanosecond Nd：YAG laser operating at 355 nm in air is investigated at the different focusing positions of the laser beam by using a time-resolved shadowgraph imaging technique. The results show that in the case of a target surface set at the off-focus position, the condition of the focal point behind or in front of the target surface greatly influences the evolution of an Al plasma shock wave, and an ionization channel forms in the case of the focal point set in front of the target surface. Moreover, it is found that the shadowgraph with the evolution time around 100 ns shows that a protrusion appears at the front tip of the shock wave if the focal point is at the target surface. In addition, the calculated results of the expanding velocity of the shock wave front, the mass density, and pressure just behind the shock wave front are presented based on the shadowgraphs.
For the next-generation beyond extreme ultraviolet lithography （EUVL） sources, gadolinium （Gd） plasma with emis- sion wavelength at 6.7 nm seems to be the leading candidate. Similar to the Sn target 13.5 nm light source, ion debris mitigation is one of the most important tasks in the laser-produced Gd plasma EUV source development. In this paper, a dual-laser-pulse scheme, which uses a low energy pulse to produce a pre-plasma and a main pulse after a time delay to shoot the pre-plasma, is employed to mitigate the energetic ion generation from the source. Optimal conditions （such as pre-pulse energy and wavelength, and the time delay between the pre-pulse and the main pulse for mitigating the ion energy） are experimentally obtained, and with the optimal conditions, the peak of the ion energy is found to be reduced to 1/18 of that of a single laser pulse case. Moreover, the combined effect by applying ambient gas to the dual-pulse scheme for ion debris mitigation is demonstrated, and the result shows that the yield of Gd ions is further reduced to around 1/9 of the value for the case with dual laser pulses.
It is shown that the continuum emission produced by an A1 alloy ablated by femtosecond laser pulses is much more polarized than the characteristic lines of elements. A Glan-Thomson polarizer is used in the laser-induced breakdown spectroscopy experiment to investigate the polarization effect. The use of the polarizer at its minimal transmission increases the signal-to-noise ratio. The effects of angle of detection, focal position, and pulse energy on the signal-to- noise ratio are also studied.
Extreme ultraviolet lithography is most promising for the next generation lithography. However, debris from laser-produced plasma, particularly energetic ions, severely decreases the lifetime of extreme ultraviolet optics. We measured the characteris- tics of ions from tin plasma by the time of flight method with a frequency-doubled Nd： YAG laser at the intensity of 3.5x1010 W/cm2 （532 nm, 8 ns）. Our measurement shows that the maximum and peak of tin ions energies from plasma under the above experimental parameters are about 4.2 and 1.8 keV, respectively. Moreover, it is found that kinetic energy angular distribution of tin ions can be fitted by cos0.8（θ）, where θ is the angle with respect to the target normal. We also investigated the mitigation effect of argon, helium gases to the tin ions, and found that tin ions from the plasma can be mitigated effectively at the pressure -38 mTorr for argon or -375 mTorr for helium, respectively.
基于聚偏二氟乙烯压电传感器,对铜靶材中纳秒激光脉冲诱导的冲击波传播过程进行了实验研究,给出了铜靶材内冲击压强随激光脉冲能量和靶材厚度的变化规律.实验结果表明:500 m J激光脉冲能量作用到2 mm厚的铜靶材产生的冲击压强达到2.1 MPa;激光脉冲能量从200 m J增加到500 m J,在铜靶材厚度为2和4 mm条件下,冲击压强分别增加了162%和231%;而当铜靶材厚度从2 mm增加到6 mm时,在400和500 m J激光脉冲能量作用下,铜靶材内冲击压强分别降低了32%和49%.
