The electron drift velocity, electron energy distribution function （EEDF）, densitynormalized effective ionization coefficient and density-normalized longitudinal diffusion velocity are calculated in SF6-O2 and SFs-Air mixtures. The experimental results from a pulsed Townsend discharge are plotted for comparison with the numerical results. The reduced field strength varies from 40 Td to 500 Td （1 Townsend=10-17 V.cm2） and the SF6 concentration ranges from 10% to 100%. A Boltzmann equation associated with the two-term spherical harmonic expansion approximation is utilized to gain the swarm parameters in steady-state Townsend. Results show that the accuracy of the Boltzlnann solution with a two-term expansion in calculating the electron drift velocity, electron energy distribution function, and density-normalized effective ionization coefficient is acceptable. The effective ionization coefficient presents a distinct relationship with the SF6 content in the mixtures. Moreover, the E/Ncr values in SF6-Air mixtures are higher than those in SF6-O2 mixtures and the calculated value E/Ncr in SF6-O2 and SF6-Air mixtures is lower than the measured value in SFB-N2. Parametric studies conducted on these parameters using the Boltzmann analysis offer substantial insight into the plasma physics, as well as a basis to explore the ozone generation process.
Pulsed dielectric barrier discharge is a promising technology for ozone generation and is drawing increasing interest. To overcome the drawback of experimental investigation, a kinetic model is applied to numerically investigate the effect of gas parameters including inlet gas temperature, gas pressure, and gas flow rate on ozone generation using pulsed dielectric barrier discharge. The results show that ozone concentration and ozone yield increase with decreasing inlet gas temperature, gas pressure, and gas flow rate. The highest ozone concentration and ozone yield in oxygen are about 1.8 and 2.5 times higher than those in air, respectively. A very interesting phenomenon is observed： the peak ozone yield occurs at a lower ozone concentration when the inlet gas temperature and gas pressure are higher because of the increasing average gas temperature in the discharge gap as well as the decreasing reduced electric field and electron density in the microdischarge channel. Furthermore, the sensitivity and rate of production analysis based on the specific input energy （SIE） for the four most important species 03, O, O（1D）, and O2（b1∑） are executed to quantitatively understand the effects of every reaction on them, and to determine the contribution of individual reactions to their net production or destruction rates. A reasonable increase in SIE is beneficial to ozone generation. However, excessively high S1E is not favorable for ozone production.
The influence mechanism of a small amount of SF6 on ozone generation in oxygen or air discharge is investigated.Some results are obtained by probing into the number of the high-energy electrons,which have the sufficiency energy for generating ozone.Introducing a small amount of SF6 into oxygen sharply decreases the number of high-energy electrons,because the electron density decreases sharply while the mean electron energy remains constant due to higher breakdown voltage and lower discharge power,and some high-energy electrons are consumed by the excitation and attachment of SF6.In contrast,when a small amount of SF6 is added into dry air discharge,despite the consumption of the excitation and attachment of SF6,the number of high energy electrons increases sharply,which is attributed to the higher mean electron energy and electron density resulted from higher breakdown voltage and discharge power.When the volume fraction of SF6 increases from 0 to 2.22%,the ozone mass concentration and the ozone yield increase by 45.7% and 29.7%,respectively.Therefore,though the oxygen source should avoid the presence of SF6,adding a small amount of SF6 can improve the ozone mass concentration and the efficiency of ozone generation.
WEI Linsheng DONG Guopan ZHANG Yafang YUAN Dingkun HU Zhaoji FU Chunyi
