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国家自然科学基金(60306006)

作品数:5 被引量:10H指数:1
相关作者:孙霞丁泽军肖沛尤四方吴自勤更多>>
相关机构:中国科学技术大学更多>>
发文基金:国家自然科学基金更多>>
相关领域:理学金属学及工艺电子电信一般工业技术更多>>

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MONTE CARLO SIMULATION OF SPIN-POLARIZED SECONDARY ELECTRONS FROM IRON
2005年
A Monte Carlo model considering the electron spin direction and spin asymmetry h as been developed. The energy distribution of the secondary electron polarizatio n and the primary energy dependence of the polarization from Fe are studied. The simulation results show that: (1) the intensity of the spin-up secondary electr ons is larger thanvthat of thevspin-down secondary electrons, suggesting the s econdary electrons are spin polarized; (2) the spin polarization of secondary el ectrons with nearly zero kinetic energy is higher than the average valance spin polarization, Pb=27% for Fe. With increasing kinetic energy, the spin polarizat ion of the secondary electrons decreases to the value of Pb, remaining constant at higher kinetic energies; (3) the spin polarization increases with an increase in the primary energy and reaches a saturation value at higher primary energy i n both the Monte Carlo simulation and experimental results.
K. Salma
Mott散射和电子极化术被引量:1
2005年
文章回顾了Mott散射过程及其物理图像,介绍了Sherman函数的定义、计算和测量,简述了探测自旋极化电子的仪器———Mott电子极化仪的一般设计,列举了获得自由极化电子的几种方法和原理.
孙霞丁泽军肖沛吴自勤
关键词:散射自旋极化电子物理图像N函数
ENERGY-LOSS FUNCTIONS DERIVED FROM REELS SPECTRA FOR ALUMINUM
2005年
The effective energy loss functions for Al have been derived from differential i nverse inelastic mean free path based on the extended Landau approach. It has be en revealed that the effective energy loss function is very close in value to th e theoretical surface energy loss function in the lower energy loss region but g radually approaches the theoretical bulk energy loss function in the higher ener gy loss region. Moreover, the intensity corresponding to surface excitation in e ffective energy loss functions decreases with the increase of primary electron e nergy. These facts show that the present effective energy loss function describe s not only surface excitation but also bulk excitation. At last, REELS spectra s imulated by Monte Carlo method based on use of the effective energy loss functio ns has reproduced the experimental REELS spectra with considerable success.
Z.M.ZhangZ.J.DingH.M.LiK.SalmaX.SunR.ShimizuT.KoshikawaK.Goto
关键词:ALUMINUM
电子束光刻的邻近效应及其模拟被引量:9
2006年
用MonteCarlo方法模拟和分析了电子束光刻中限制其分辨率的主要因素———邻近效应的影响.分析了入射电子束的形状、入射电子的能量、衬底材料和厚度对邻近效应大小的影响,并与实验结果进行了比较,发现模拟结果与实验结果符合得很好.分析表明高斯分布的电子束比理想电子束的邻近效应大;衬底原子序数越大,衬底越厚,入射电子束能量越低,邻近效应越大.
孙霞尤四方肖沛丁泽军
关键词:电子束光刻MONTE
电子束光刻中邻近效应的Monte Carlo模拟
<正> 电子束光刻不受衍射效应的限制,具有高分辨率和能产生特征尺寸在100nm以下图形的优点。目前,国际上正在将角度限制散射的投影电子束光刻技术作为21世纪100纳米以下器件大规模生产的主流光刻技术进行重点开发。
孙霞丁泽军肖沛吴自勤
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