An improved trench gate super-junction insulated-gate bipolar transistor is presented. The improved structure contains two emitter regions. The first emitter region of the device works as the conventional structure,which can absorb both the electron current and hole current. The second emitter on the top of the p-pillar acts as the hole current diverter, leading to an improved latch-up capability without sacrificing the off-state breakdown voltage(BV) and turn-off loss. The simulation shows that the latch-up limit of the SJ-IGBT increases from 15000 to 28300 A/cm^2 at VGE D10 V, the BV is 810 V, and the turn off loss is 6.5 m J/cm^2 at Von D1.2 V.
A novel lateral insulated gate bipolar transistor on a silicon-on-insulator substrate SOI-LIGBT with a special low-doped P-well structure is proposed.The P-well structure is added to attach the P-body under the channel so as to reduce the linear anode current degradation without additional process.The influence of the length and depth of the P-well on the hot-carrier HC reliability of the SOI-LIGBT is studied.With the increase in the length of the P-well the perpendicular electric field peak and the impact ionization peak diminish resulting in the reduction of the hot-carrier degradation. In addition the impact ionization will be weakened with the increase in the depth of the P-well which also makes the hot-carrier degradation decrease.Considering the effect of the low-doped P-well and the process windows the length and depth of the P-well are both chosen as 2 μm.
The ESD response characteristic in a p-type symmetric lateral DMOS (ps-LDMOS) has been investigated. The experimental results show that the ps-LDMOS has weak ESD robustness due to an absence of the "snapback" characteristic. In addition, the location of the hot spot changes little for the special device. The method for reducing the lattice temperature of the hot spot can be used to enhance the ESD capacity of the ps-LDMOS, thereby, a novel and easily-achievable ps-LDMOS structure with a p-type lightly doped drain (p-LDD) has been proposed. The special region p-LDD lowers the electric field at the edge of the poly gate, making the whole dis- tribution of the surface electric field more uniform. Therefore, the ESD robustness is improved two times and no obvious change of other electric parameters is introduced.