This paper uses finite element method to obtain the three-dimensional temperature field of laser-induced transient thermal grating （TTG） for two-layered structure of diamond film on ZnSe substrate. The numerical results indicate that unique two-times heating process is gradually experienced in the area between two adjacent grating stripes. However, there is a little change for the temperature field along the depth direction for the diamond film due to its great thermal conductivity. It further finds that the thickness of the diamond film has a significant influence on the temperature field in diamond/ZnSe system. The results are useful for the application of laser-induced TTG technique in film/substrate system.
