For both the vibrating and steady supporting surfaces of a scanning disk in a Besocke-style piezoelectric scanner, a theoretical model is given by considering the nonlinear lateral friction at the micro-contact interface between the positioning legs and the supporting surface. Numerical simulations demonstrate that unexpected flexural vibrations can arise from a vibrating ramp, and their frequencies are lower than the eigenfrequencies of the scanner in the linearly elastic regime. The vibrations essentially depend on 1） the vibrational states of the supporting ramp and the steel ball tips on the three piezo- electric positioning legs, and 2） the tribological characteristics of the contacts between the tips and the ramp. The results give an insight into the intrinsic vibrations of the scanners, and are applicable in designing and optimizing piezoelectric scanning systems.
Flexural resonance vibrations of piezoelectric ceramic tubes in Besocke-style scanners with nanometer resolution are studied by using an electro-mechanical coupling Timoshenko beam model. Meanwhile, the effects of friction, the first moment, and moment of inertia induced by mass loads are considered. The predicted resonance frequencies of the ceramic tubes are sensitive to not only the mechanical parameters of the scanners, but also the friction acting on the attached shaking ball and corresponding bending moment on the tubes. The theoretical results are in excellent agreement with the related experimental measurements. This model and corresponding results are applicable for optimizing the structures and performances of the scanners.
