This paper first reviews an EUV normal incidence solar telescope that we have developed in our lab. The telescope is composed of four EUV telescopes and the operation wavelengths are 13.0 nm, 17.1 nm, 19.5 nm, and 30.4 nm. These four wavelengths, fundamental to the research of the solar activity and the atmosphere dynamics, are always chosen by the EUV normal incidence solar telescope. In the EUV region, almost all materials have strong absorption, so optics used in this region must be coated by the multilayer. The Mo/Si multilayers used for the EUV normal incidence solar telescope are designed and fabricated by the magnetron sputtering coating machine. The characteristics of these multilayers, such as reflectivity and thermal stability at wavelengths of 13.0 nm, 17.1 nm, 19.5 nm and 30.4 nm, are also described. All the multilayers were measured by a hard X-ray diffractometer (XRD) and an EUV/soft X-ray reflectometer (EXRR) before and after heating (in a vacuum chamber) at 100℃ for 24 hours and at 200℃ for 1 hour and 4 hours. The results show that Mo/Si multilayers have high reflectivity at 13.0 nm, 17.1 nm, and 19.5 nm but low at 30.4 nm. We found no change in the reflectivity and center wavelength of these multilayers by comparing the reflectivity curves before and after heating. This suggests the thermal stability of Mo/Si multilayers may meet our requirement in future solar observation missions.
In this paper we have reviewed our achievements in soft X-ray and extreme ultraviolet (EUV) optics. Up to now, the research system of soft X-ray and EUV optics has been established, including light sources, detectors, calibrations, optical testing and machining of super smooth mirrors, and fabrications of multilayer film mirrors. Based on our achievements, we have developed two types of solar space telescopes for the soft X-ray and EUV space solar observations. One is an EUV multilayer normal incident telescope array including 4 different operation wavelength telescopes. The operation wavelengths of the EUV telescope are 13.0, 17.1, 19.5 and 30.4 nm. The other is a complex space solar telescope, which is composed of an EUV multilayer normal incident telescope and a soft X-ray grazing incident telescope. The EUV multilayer normal incident telescope stands in the central part of the soft X-ray grazing incident telescope. The normal incident telescope and the grazing incident telescope have a common detector. The different operation wavelengths can be changed by rotating a filter wheel.
